Fourier Transform Infra Red (FTIR) Spectroscopy

Silicon–carbon–oxynitrides grown by plasma-enhanced chemical vapor deposition technique

Engineering / Technology / Plasma Processing / Thin Film / Physical sciences / Nitrogen / Radio Frequency / Optical Properties / Nitrous Oxide / Fourier transform infrared spectroscopy / Growth rate / Thin Solid Films / Low Temperature / Film Thickness / Fourier Transform Infra Red (FTIR) Spectroscopy / Nitrogen / Radio Frequency / Optical Properties / Nitrous Oxide / Fourier transform infrared spectroscopy / Growth rate / Thin Solid Films / Low Temperature / Film Thickness / Fourier Transform Infra Red (FTIR) Spectroscopy